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Products Lineup

AQUA SCIENCE’s products are concentrating on syringe machine,aiming on ecology while consider on user’s producing cost

Steam Syringe Device

For Inquiry

triton

Character of Steam Syringe Device 『triton』

Application
Polymer removal after etching
Particle removal on the water surface
Cost Reduction
Expensive organic amine solvent is not needed
Process Step Reduction
Chemicals process is omitted because polymer
and resist are removed simultaneously
Environmental Burden Reduction
DIW as raw material
Decrease in the volume of chemicals consumption


Basic Configuration
Special Designed Steam Generator
Single Steam Sonic Jet Nozzle
Archimedes Control System
EFEM(Transportation System L/UL)
Control System & User Inter-face
Gas and Water Flow-control system
Exhaust,Drain(with mist trap from steam chamber)
Standard Specifications
Quantity of Chamber: 2 Chambers
Wafer Size: 150,200mmΦ
Quantity of Cassette: 2 Cassettes
Water and Gases: DIW、N₂、CDA
Vapor Pressure Control Range: 0.05 - 0.2MPa
System Dimensions(mm): 1100(W)×1800(D)×2000(H)

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For Enquiry

triton-PV

Character of steam syringe device 『triton-PV,LED』

Application
Resist・Paste Removal
Cost Reduction and Compact Design
Expensive chemicals is not needed Smaller foot print
High Throughput capability
>500 slices / hour by consecutive run
Environmental Burden Reduction
DIW as raw material





Basic Configuration
Special Designed Steam Generator
Multi Steam Sonic Jet Nozzle
Air Knife and Warm Air Dry
Transportation System by Magnet Roller
Control System & User Inter-face
Gas and Water Flow-Control System
Exhaust and Drain
Standard Specifications
Board Size: 126 - 156mm□
Water and Gases: DIW、N₂、CDA
Vapor Pressure Control Range: 0.05 - 0.2MPa
System Dimensions(mm): 2200(W)×850(D)×1500(H)
 
 
 

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For Enquiry

triton-PV

Character of steam syringe device 『triton-PV,LED』

Application
Au lift off process
Resist removal
WAX・OIL Removal
Cost Reduction and Compact Design
Expensive chemicals is not needed
Smaller foot print
Improved Au Collection Rate
Cost reduction by more than 95% Au Collection in Au lift off process
Environmental Burden Reduction
DIW as raw material
Decrease in the volume of chemicals consumption

Basic Configuration
Special Designed Steam Generator
Multi Steam Sonic Jet Nozzle
DIW as raw material
EFEM(Transportation System)
Control System & User Inter-face
Gas and Water Flow-control system
Exhaust and Drain
Standard Specifications
Wafer Size: 50 - 150mmΦ
Water and Gases: DIW、N₂、CDA
Vapor Pressure Control Range: 0.05 - 0.2MPa
System Dimensions(mm): 1200(W)×1500(D)×2200(H)
 
 
 

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Ozonated water syringe device

For Inquiry

Aurora

Character of Ozonated water syringe device 『Aurora』

Application
Resist strip after ion implantation
Resist strip after etching
Cost Reduction
Reduced running cost by omitting chemicals cleaning process
Faster removal rate(2 - 4μm/min) provides higher througput
Process Step Reduction
Chemicals process is omitted after resist ashing
Environmental Burden Reduction
Oxygen and water as material source
 

Basic Configuration
High Temperature / High Concentration Ozonated Water Generator
Uniform Distribution on High Ozone Concetration with Nozzle
Back Side Wafer Availability
Transportation System
Control System & User Inter-face
Gas and Ozonated Water Flow-Control System
Exhaust and Drain
Standard Specifications
Quantity of Chamber: 2 Chambers
Wafer Size: 150,200,300mmΦ
Quantity of Cassette: 2 Cassettes
Water and Gases: DIW、 N₂、O₂、CO₂、 CDA
System Dimensions(mm): 1100(W)×2050(D)×2000(H)
 
 

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